www.qtechnanosystems.com

NANOMETROLOGY

Semiconductor Field using Nanopositioning
	Interferometer Nano Film Thickness Measurements Nano – Indentation Profilometry Calibrations Ellipsometry

TECHNOLOGY

Sub – aperture stitching can address all these needs and is an advanced metrological solution. Scanning interferometer characterizes surfaces, multipurpose white-light optical testing device measures rough surfaces better than conventional instruments with monochromatic sources.

The nano-indentation module is at the heart of the Nano-Test materials testing centre. To measure nano-mechanical properties (such as micro-hardness and elastic modulus), a very small calibrated diamond probe is brought into contact with the sample surface and a load is applied by means of a coil and magnet located at the top of the pendulum.

QTECH'S TECHNOLOGICAL SOLUTIONS

Mechanical Stage: Roto Balanced Mechanical Stage or Monolithic Compound Flexures with Amplifier

Actuator: Linear & rotory solid state motors can be integrated for long range or Peltier Actuator

Driver: Programmable with control systems based power drive; Hybrid integration facility.

Sensor: Capacitive or based on customers’ demands

Software: customer made software. Additional facility to integrate with instruments is present for data retrieval.

APPLICATION SEGMENTS OF NANOLITHOGRAPHY

Nanotechnology
Automobile
Aerospace / Astronomy
Semiconductor
Electronics
Tribology / Nanotribology
Precision Industries

SPECIFICAIONS