Nanopositioner is a heart of the micro-machines including MEMS / NEMS / MOMS / NOMS. Micromachine is expected to be an industrial base in the 21st century. The reason is it would create a new technological paradigm, which presents solutions to current human problems and, at the same time, presents fresh opportunities for a new human life and also new industries. Key elements of device production are the manufacturing technique, substrate and material deposited. Changing one of these affects the other two. As all three are in constant development, the testing and development procedures can be lengthy.

 

Precision machineries and instruments need to take heavy load up to sometime 20 Kg as payload. Mostly nanopositioning is used for tool and work adjustments and need for hold in certain position are crucial. Hence stability, accuracy and high stiffness are key factors. Linearity and high speed are not so crucial here. Vibration elimination is additional requirements.